We demonstrate an electrowetting-based liquid optical phase shifter. The phase shifter consists of two immiscible liquid layers with different refractive indices. Sandwiched between the two liquids is a rigid membrane that moves freely along the optical axis and is supported by a compliant surround. When applied with a pressure, the thicknesses of both liquid layers change, which induces a difference in optical path, resulting in a phase shift. A miniaturized electrowettingbased actuator is used to produce hydraulic pressure. A multi-layered SU8 bonded structure was fabricated. A phase shift of 171° was observed when the device was incorporated in the Mach-Zehnder interferometer and driven with 100 V.

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